High-resolution x-ray analysis with multilayer gratings

Periodic multilayers are nowadays widely used to perform x-ray analysis in the soft x-ray range (photon energy lower than 1 keV). However, they do not permit to obtain highresolution spectra like natural or synthetic crystals. Thus, multilayers cannot resolve interferences between close x-ray lines. It has been shown and demonstrated experimentally that patterning a grating profile within a multilayer structure leads to a diffractive optics with improved resolving power. We illustrate the use of a Mo/B4C multilayer grating in the Fe L and C K spectral ranges, around 700 eV and 280 eV respectively. First, in the Fe L range, the improved spectral resolution enables us to distinguish the Fe L and L emissions (separated by 13 eV). In addition, using a sample made of a mix of LiF and an iron ore, we show that it is possible to easily resolve the F K and Fe L emissions. These examples demonstrate that an improved x-ray analysis can be obtained with multilayer gratings when there is the need to study samples having elements giving rise to close emission lines. Second, in the C K range, by comparing C K spectra from B4C and cellulose, we show that the shape of the emission band is sensitive to the chemical state of the carbon atom.